Molybdenum hexafluoride Information & Molybdenum hexafluoride Links at HealthHaven.com

Molybdenum hexafluoride
Identifiers
CAS number	7783-77-9
Properties
Molecular formula	MoF6
Molar mass	209.93 g/mol
Appearance	white crystals or colorless liquid; hygroscopic
Density	2.54 g/cm3
Melting point	17.5 °C, 291 K, 64 °F
Boiling point	34 °C, 307 K, 93 °F
Solubility in water	hydrolyzes
Structure
Crystal structure	Orthorhombic, oP28
Space group	Pnma, No. 62
Coordination; geometry	octahedral (Oh)
Dipole moment	0
	Except where noted otherwise, data are given for materials in their standard state (at 25 °C, 100 kPa)
	Infobox references

Molybdenum hexafluoride is the highest fluoride of molybdenum. It is a solid which melts just below room temperature; in water, it hydrolyses to give hydrofluoric acid.^[1]

It has few uses, and generally appears as an impurity in uranium hexafluoride (in the nuclear industry) or tungsten hexafluoride (in the semiconductor industry; WF₆ is used for chemical vapour deposition of tungsten ^[2]); it can be removed from the latter by reduction of a WF6-MoF6 mixture with any of a number of elements including molybdenum at moderately elevated temperature (US patents 5234679, 6896866)

[edit] References

^ Greenwood, Norman N.; Earnshaw, A. (1997), Chemistry of the Elements (2nd ed.), Oxford: Butterworth-Heinemann, ISBN 0-7506-3365-4
^ http://www.timedomaincvd.com/CVD_Fundamentals/films/W_WSi.html

[0] Greenwood, Norman N.; Earnshaw, A. (1997), Chemistry of the Elements (2nd ed.), Oxford: Butterworth-Heinemann, ISBN 0-7506-3365-4

[1] ttp://www.timedomaincvd.com/CVD_Fundamentals/films/W_WSi.html

[1]

[2]