KLA Tencor:
KLA-Tencor Corporation (NASDAQ: KLAC) is a supplier of metrology and inspection tools for integrated circuit (IC) manufacturers. The company has a comprehensive portfolio of products designed to help manufacturers improve yield -- the fraction of chips that function properly.
The fabrication of an IC is accomplished by depositing a series of film layers upon a silicon wafer that act as conductors, semiconductors or insulators. Numerous other process steps create circuit patterns, remove portions of the film layers, and perform other functions such as heat treatment. The role played by KLA-Tencor's products is to monitor the results of these steps to allow the manufacturer to control them. KLA-Tencor’s product portfolio can be broadly categorized into four groups: Defect Inspection, Metrology, Services and Software.
Defect Inspection
- Patterned and unpatterned wafer inspection (optical and electron beam)
- Defect analysis software
- Defect classification software
Photomask Inspection
Metrology:
- Optical overlay measurement
- Film thickness measurement
- Film stress measurement
- Critical dimension (geometry of the finest structures)
- Surface profiling
- Compositional measurement
- Resistivity measurement
Process Control Services
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